ILDEx is novel Inter-Layer Dielectric-structure Extraction system, which enable non-distructive quick electrical measurement of ILD thickness & dielectric constant. This work has been conducted by STARC & Fuji Research Institute Corporation, and the system is available from Fuji-RIC. STARC-SPICE is spice-like circuit simulater developed by STARC & Hitachi ULSI Systems Co.,Ltd., in which updated HiSIM model as well as BSIM series are implemented. It also provide LiCR (Li: inverse of Inductance Matrix) high stable computation Capability. The simulator is available from Hitachi-ULSI. PowerSpective and LiCRSIM makes a chip-level LCR extraction and linear simulation system,which focuses on chip interconnect inductance design and verification. High speed with accuracy is the key feature.These software tools will be available from Mathematical Systems Inc. by the end of 2002.